For MS6 Atomiswave via Demul, do not get a Mame version of MS6 it is not real, either it is a Bootleg version of 3, or something else, Neo Geo did not and could not run MS 6 only atomiswave or your playing a ported version of an emulated version on some console. Outside of that, best to simply emulate as close to source as possible, this means for MS1-5 Neo Geo MVS AES via MAME. IMO current the best option is emulation until some company can make a product that offers those above things, either individual games or preferable as anthology pack.
People want a steam release proper, so it can have option for multiplayer, and also anthology edition has Combat missions and extras including art work.